Use of a Two-Dimensional Array Illumination in Laser Machining for Improving Throughput

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概要

• 論文の詳細を見る

• We report a laser-machining method that uses a two-dimensional array of beam spots to attain a high throughput. A phase grating is used as an array generator. Multiple spots lined up parallel as well as perpendicular to the machining direction are beamed on a workpiece atop a table, leaving marks. The mark size and spacing and the table speed are mutually related in a way that allows the said marks to overlap each other to process the workpiece. Theoretically, the use of m spots, compared to a single spot, in the machining direction enables an m-time increase in throughput. To corroborate the idea experimentally, we cut a photoconductive film with a pair of spots and found cutting throughput to be doubled.

• 社団法人応用物理学会の論文
• 1998-12-15

著者

• AMAKO Jun

  Corporate R & D, Seiko Epson Corporation

• Amako Jun

  Corporate R&d Seiko Epson Corporation

• UMETSU Kazushige

  Production Engineering Development Division, Seiko Epson Corporation

• Umetsu Kazushige

  Production Engineering Development Division Seiko Epson Corporation

関連論文

• Application of a Phase-grating Beamsplitter in Laser-Processing Indium-Tin-Oxide Films for Liquid Crystal Panels
• Use of a Two-Dimensional Array Illumination in Laser Machining for Improving Throughput

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