Thermo-Flow Structure and Epitaxial Uniformity in Large-Scale Metalorganic Chemical Vapor Deposition Reactors with Rotating Susceptor and Inlet Flow Control
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-10-15
著者
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Tzong Ruey-yau
Quality Assurance Department Everest Technology Hsinchu Industrial Park
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Soong Chyi-yeou
Rotating Fluids And Vortex Dynamics Laboratory Department Of Aeronautical Engineering Clung Cheng In
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CHYUAN Chung-Using
Graduate School of Defense Science studies, Chung Cheng Institute of Technology
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Chyuan Chung-using
Graduate School Of Defense Science Studies Chung Cheng Institute Of Technology
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Chyuan Chung-Hsing
Graduate School of Defense Science studies, Chung Cheng Institute of Technology