Development of Piezoelectric Accelerometer of Charge-Shear Type Having Temperature-Independent Sensitivity

概要

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A piezoelectric accelerometer based on detecting piezoelectric charge Q_1 caused by shear strain S_5 has been developed, which consists of two piezoelectric elements made from a ferroelectric ceramic and one condenser element also made from a ferroelectric ceramic. Positive temperature dependence of dielectric constant of the former piezoelectric element (PbZr_<0.51> Ti_<0.49> O_3 modified with 0.7 mo1% Nb_2O_5) is compensated by negative dependence of the latter condenser element [Pb_<0.8>La_<0.2>(Zr_<0.4>Ti_<0.6>)_<0.95>O_3 or Pb_<0.7>Sr_<0.2>La<0.1>(Zr_<0.5>Ti_<0.5>)_<0.975>O_3] over a range of -50 to 3OO℃, with the result that sensitivity and its deviation are obtained to be 42×10^<-12> C/G and within 5%, respectively.
社団法人応用物理学会の論文
1998-04-15