Low-Temperature Deposition of SrTiO_3 Thin Films by Electron-Cyclotron-Resonance Sputtering for Monolithic Microwave Integrated Circuits Operatirng in the mm-Wave Band

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-04-15

著者

• Ikuta Kenji

  Ntt System Electronics Laboratories

• TSUKADA Mitsuo

  NTT System Electronics Laboratories

• NISHIMURA Hiroshi

  NTT System Electronics Laboratories

関連論文

• Upper-bound Frequency for Measuring mm-Wave-Band Dielectric Characteristics of Thin Films on Semiconductor Substrates
• Low-Temperature Deposition of SrTiO_3 Thin Films by Electron-Cyclotron-Resonance Sputtering for Monolithic Microwave Integrated Circuits Operatirng in the mm-Wave Band
• Low-Temperature Deposition of SrTiO3 Thin Films by Electron-Cyclotron-Resonance Sputtering for Monolithic Microwave Integrated Circuits Operating in the mm-Wave Band

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