Polarized Optical Heterodyne Profilometer

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概要

• 論文の詳細を見る

• A quasi common path polarized optical heterodyne interferometer with an aluminum coated polarized beam splitter is proposed in order to sense the surface profile. The heterodyned P wave is generated by two acousto-optic modulated P waves with different frequencies in the Mach-Zehnder interferometer. So is the heterodyned S wave. Both heterodyned P wave and S wave propagate through quasi common optical path in the interferometer. An aluminum coated polarized beam splitter was used to conduct a quasi common path configuration to sense the surface profile. The stability of the interferometer was ±0.25°/0.5h and 0.5% in phase and amplitude respectively. The height sensitivity was 2Å and the lateral resolution was 2 μm in the experiment. In case of a birefringence lens or a Wollaston prism is suggested to replace the aluminum coated polarized beam splitter, a novel polarized common path profilometer with better stability is expected.

• 社団法人応用物理学会の論文
• 1998-01-15

著者

• Chou Chien.

  Shool Of Medical Technology National Yang Ming Univerisity

• Chou Ling-yu.

  Department Of Mechanical Engineering National Taiwan University

• HUANG Yeu-Chuen

  Department of Mechanical Engineering, Chuan Yuan Christian University

• HUANG Yeu-Chuen.

  Department of Mechanical Engineering, Chuan Yuan Christian University

• SHYU Jenn-Chyang.

  Institute of Mechnical & Electronic Engineering, Huafan College of Humanities and Technology

• CHANG Ming.

  Department of Mechanical Engineering, Chuan Yuan Christian University

• Huang Yeu-chuen.

  Department Of Mechanical Engineering Chuan Yuan Christian University

• Shyu Jenn-chyang.

  Institute Of Mechnical & Electronic Engineering Huafan College Of Humanities And Technology

• Chang Ming.

  Department Of Mechanical Engineering Chuan Yuan Christian University

• Chou Chien

  Shool of Medical Technology, National Yang Ming Univerisity

• Chou Ling-Yu

  Department of Mechanical Engineering, National Taiwan University

関連論文

• Amplitude Sensitive Optical Heterodyne and Phase Lock-in Technique on Small Optical Rotation Angle Detection of Chiral Liquid
• Polarized Common Path Optical Heterodyne Interferometer for Measuring the Elliptical Birefringence of a Quartz Wave Plate
• Polarized Optical Heterodyne Profilometer

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