Physical Properties of CoFe/IrMn Spin-Valves Prepared Using Ion Beam Sputtering with an Xe-H_2 Mixture Gas

概要

論文の詳細を見る
Co_<90>Fe_<10>/Cu/Co_<90>Fe_<10>/Ir_<25>Mn_<76> spin-valves with a Ta seed layer were prepared by ion beam sputtering. Improvements in magnetoresistive (MR) and magnetic properties were obtained by adding H_2 to Xe sputtering gas. Specifically, the coercivity in the free Co_<90>Fe_<10> layer considerably decreased as the H_2 flow rate was increased. Furthermore, exchange coupling between the Ir_<25>Mn_<75> and pinned Co_<90>Fe_<10> layers became stronger in the preparation under the higher H_2 flow rate. X-ray diffraction, transmission electron microscopy, and secondary ion mass spectroscopy observations suggest that micro-crystallization of each layer is responsible for improving the MR and magnetic properties.
社団法人応用物理学会の論文
1997-11-15