Mechanical Properties of (Ti_<1-x>Al_x)N_<0.3> Films Prepared by the Dynamic Ion Mixing Method
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-04-15
著者
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Nakamura Isao
Department of Mechanical Engineering Hachinohe Institute of Technology
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TAKANO Ichiro
Departments of Toxicology, The Tokyo Metropolitan Research Laboratory of Public Health
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KAMIYA Makoto
Department of Pathology, Gunma University School of Medicine
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Nakamura Isao
Department Of Legal Medicine Gifu University School Of Medicine
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Kamiya Makoto
Department Of Electrical Engineering Kogakuin University
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Takano Ichiro
Department Of Electrical Engineering Kogakuin University
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SAWADA Yoshio
Department of Electrical Engineering, Kogakuin University
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Sawada Yoshio
Department Of Electrical Engineering Kogakuin University
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Nakamura Isao
Department Of Chemistry Shizuoka University
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Nakamura Isao
Department Of Electrical Engineering Kogakuin University
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