Time-Dependent Temperature Calculation of Aluminum Line Applied with Electrical-Overstress Pulses

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概要

• 論文の詳細を見る

• When electrical-overstress (EOS) pulses are applied to an aluminum line, the temperature of the aluminum line will increase due to Joule heating. Since aluminum is a good conductor of heat, some of the heat generated will escape. This causes the deviation of the aluminum-line temperature from that predicted adiabatically. A computer simulation program, which employs the two-dimensional finite-element method, was developed to calculate transient aluminum-line temperature. In this program, the heat transfer coefficient α_c is introduced to simulate heat escape. EOS pulse experiments were performed to determine the value of α_c of an aluminum line. Using this value, the transient temperature of the aluminum line applied with EOS pulses was simulated. The threshold energy for fusing, which increases the peak temperature of the aluminum line to the fully vaporized point, was calculated for aluminum lines having various widths.

• 社団法人応用物理学会の論文
• 1996-07-15

著者

• Yamamoto Keiji

  Quality Assurance Department Mos-lsi Division Semiconductor Business Headquarters Sanyo Electric Co.

• TSURU Takahiro

  Quality Assurance Department, MOS-LSI Division Semiconductor Business Headquarters, SANYO Electric C

• Tsuru T

  Gakushuin Univ. Tokyo Jpn

関連論文

• Time-Dependent Temperature Calculation of Aluminum Line Applied with Electrical-Overstress Pulses
• Development of Mechanical Stress Simulator for Surface-Mount Devices

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