Combined Gas Microflowmeter and Potentiometric Sensor

概要

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A gas microflowmeter based on a potentiometric chemical sensor is demonstrated. The flowmeter operates on the hot-wire principle. Electric current is passed through a platinum microbridge. A preset bridge resistance is kept constant by regulating the heating current. By measuring the changes in the heating current, the calibration flow curve can be obtained. The temperature profiles of both the electrically heated microbridge and the substrate in its vicinity, measured with an infrared microscope, are presented.
社団法人応用物理学会の論文
1995-09-15