Electron Distribution Functions in a Sputtering Magnetron Discharge
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概要
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The electron distribution function g(v_z) in a cylindrically symmetric, planar, sputtering magnetron has been characterized using a one-sided, planar Langmuir probe. Measurements were made above the magnetic trap at six radial locations in the direction normal to the cathode. The distribution function is found to be non-Maxwellian, with a shape that depends sensitively on radial position. Near the symmetry axis, g (v_x) is anisotropic and exhibits a strong electron drift from the cathode to the anode. Off axis, g (v_x) is nearly symmetric and has two components: a dense, cold Maxwellian component, and a tenuous, energetic shell component.
- 社団法人応用物理学会の論文
- 1995-09-15
著者
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Sheridan T.
Department Of Physics And Astronomy The University Of Iowa
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GOECKNER M.
Department of Physics and Astronomy, The University of Iowa
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GOREE J.
Department of Physics and Astronomy, The University of Iowa
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Goree J.
Department Of Physics And Astronomy The University Of Iowa
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Goeckner M.
Department Of Physics And Astronomy The University Of Iowa