The Analysis of Chemical State of Obliquely Evaporated Co-Ni-O Film by Auger Electron Spectroscopy

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概要

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• Obliquely evaporated Co-O and Co-Ni-O films show different coercivity dependences on saturation magnetization. To clarify the origin of this difference, we introduced numerical analysis in Auger electron spectroscopy and analyzed the chemical state (metal or oxide) of the Co-Ni-O magnetic layer. In the Co-Ni-O magnetic layer, cobalt was oxidized preferentially compared to nickel. Therefore the compositional ratio of metallic Co to Ni in the magnetic layer was assumed to be different from that of source material. This preferential oxidation of cobalt was considered to be the cause of the difference in coercivity dependences on saturation magnetization between Co-O and Co-Ni-O.

• 社団法人応用物理学会の論文
• 1995-05-15

著者

• Yano Akira

  Department Of Oral Health National Institute Of Public Health

• Kawano Mariko

  Engineering Research Laboratory, Hitachi Maxell, Ltd.

• Yano Akira

  Engineering Research Laboratory, Hitachi Maxell, Ltd.

• Mizumura Tetsuo

  Engineering Research Laboratory, Hitachi Maxell, Ltd.

• Kawano Mariko

  Engineering Research Laboratory Hitachi Maxell Ltd.

• Mizumura Tetsuo

  Engineering Research Laboratory Hitachi Maxell Ltd.

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