Electrode Lifetimes in a Plasma Focus Soft X-Ray Source
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概要
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The lifetime of electrodes and the insulator in a plasma focus device is investigated for application to shortwavelength radiation sources. Evaporation and sputtering of electrodes are the root of almost all problems when a plasma X-ray source is applied to lithography. The erosion of electrodes is reduced by the combination of polarity inversion of the applied voltage to the electrodes, application of tungsten-inserted hollow electrode to the inner electrode, and improvements in the shape of the outer and inner electrodes. Weight of the debris is reduced from 38 μg/shot to 9 μg/shot at 3.5 kJ energy discharge upon introducing these improvements. After 400,000 discharges, electrode lifetimes are estimated at more than 1 million discharges, and the ceramic insulator maintains a high discharge repetition rate. The X-ray intensity increases as the copper vapor is reduced in the pinched plasma.
- 社団法人応用物理学会の論文
- 1994-08-15