Substrate Position Dependence of Characteristics of Te-C:H Film Prepared by DC Magnetron Sputtering in Methane Atmosphere (<Special Issue> Plasma Processing)

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-07-30

著者

• ICHIHARA Katsutaro

  Research and Development Center, Toshiba Corp.

• Ohkawa Hideki

  Optical Recording & Storage Group Multimedia Disk Department Multimedia Engineering Laboratory T

• Ichihara Katsutaro

  Research And Development Center Toshiba Corporation

• OZAWA Norio

  Research and Development Center, Toshiba Corporation

• YASUDA Nobuaki

  Toshiba Intelligent Technology Corporation

• Ozawa Norio

  Research And Development Center Toshiba Corporation

関連論文

• High-Density Phase-Change Optical Disc with Low-to-High Signal Direction
• High-Density Recording Capability of Five-Layered Phase-Change Optical Disc
• Substrate Position Dependence of Characteristics of Te-C:H Film Prepared by DC Magnetron Sputtering in Methane Atmosphere ( Plasma Processing)
• High-Density Recording Capability of Five-Layered Phase-Change Optical Disc
• High-Density Phase-Change Optical Disc with Low-to-High Signal Direction

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