Experimental Studies on Electrostatic Probe Responce for Large and Rapid Voltage Swing (<Special Issue> Plasma Processing)

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概要

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• An electrostatic probe current response for large and rapid voltage swing of probe voltage is investigated experimentally. The probe current overshoot for the positive step voltage is greater than that for the negative step voltage even if the final value is the same in the electron and the ion saturation regions. The instantaneous probe current for the sinusoidal probe voltage begins to shift when the frequency exceeds the ion plasma frequency. Therefore, it has become clear that time-resolved measurement is not applicable to reduce distortion of the conventional time-averaged probe characteristics when the space potentials fluctuate rapidly.

• 社団法人応用物理学会の論文
• 1994-07-30

著者

• Yoshii H

  Department Of Electrical And Electronic Engineering Musashi Institute Of Technology

• YOSHII Hideki

  Department of Electrical and Electronic Engineering, Musashi Institute of Technology

• SASAKI Suui

  Department of Electrical and Electronic Engineering, Musashi Institute of Technology

• MATSUMURA Shousaku

  Department of Electrical and Electronic Engineering, Musashi Institute of Technology

関連論文

• Experimental Studies on Electrostatic Probe Responce for Large and Rapid Voltage Swing ( Plasma Processing)

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