Coupling of Excited-State Kinetics and Boltzmann Equation in Non-Equilibrium Plasmas (<Special Issue> Plasma Processing)

概要

論文の詳細を見る
The need for coupling heavy-particle excited-state kinetics and electron dynamics in molecular and atomic plasmas is illustrated for different plasma conditions, such as DC (direct current). RF (radio frequency), laser pumping circuit, afterglow and multipole magnetic plasmas. Different systems (N_2, H_2, O_2, He, He-CO, He-CO-CO_2-N_2, SiH_4, Ne-Xe-HCl) are discussed with emphasis on the role of excited states in shaping the electron energy distribution function under various plasma conditions.
社団法人応用物理学会の論文
1994-07-30