A Two-Dimensional Array Probe Using an Insulating Layer and a Signal Line on the Vibrator

概要

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A two-dimensional array probe using a newly developed method for drawing out signal lines is proposed. In this probe, an insulating layer and a conductive layer with about 10 μm total thickness are deposited on one electrode of a vibrator. The insulating layer has a through-hole to connect the electrode to the conductive layer. The conductive layer is patterned to inner signal lines that are terminated at both edges on the side of the vibrator. An outer signal line is drawn from each signal line terminal of the vibrator by wire bonding. The specifications of the fabricated two-dimensional array probe are 5 MHz, 30×5 elements and two acoustic matching layers. The pulse-echo characteristic and directional response of an element were evaluated, and a -6 dB bandwidth of 64% and -20 dB pulse-echo directional response of 10° were obtained. This measured bandwidth was not drastically reduced as compared with that of a conventional probe, and the measured directional response became slightly narrower as compared with the calculated result.
社団法人応用物理学会の論文
1994-05-30