Molecular Beam Mass Spectrometry Studies of Chemical Vapor Deposition of Diamond

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概要

• 論文の詳細を見る

• We have developed a novel molecular beam mass spectrometry technique that can quantitatively analyze the gas-phase composition in a chemical vapor deposition (CVD) reactor. The technique simultaneously monitors a wide variety of radical and stable species, and their concentrations can be determined with sensitivities approaching 1 ppm. Measurements performed in a diamond deposition system have provided keen insights into the important phenomena that affect the growth environment. In this paper we first discuss the primary gas sampling design issues. In the second part, details of the experimental results and their implications are described.

• 社団法人応用物理学会の論文
• 1994-04-30

著者

• Mcmaster Mark

  Sandia National Laboratories

• Hsu Wen

  Sandia National Laboratories

• COLTRIN Michael

  Sandia National Laboratories

• DANDY David

  Department of Chemical Engineering, Colorado State University

• Dandy David

  Department Of Chemical Engineering Colorado State University

関連論文

• Molecular Beam Mass Spectrometry Studies of Chemical Vapor Deposition of Diamond

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