Formation and Thermochromism of VO_2 Films Deposited by RF Magnetron Sputtering at Low Substrate Temperature

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-03-15

著者

• TANEMURA Sakae

  Multifunctional Material Science Department, National Industrial Research Institute of Nagoya

• Jin Ping

  Multifunctional Material Science Department National Industrial Research Institute Of Nagoya

• Tanemura Sakae

  Multifunctional Material Science Department

• Jin Ping

  Multifunctional Material Science Department

関連論文

• Niobium Oxide Electrochromic Thin Films Prepared by Reactive DC Magnetron Sputtering
• Nickel Oxide Electrochromic Thin Films Prepared by Reactive DC Magnetron Sputtering
• Formation and Thermochromism of VO_2 Films Deposited by RF Magnetron Sputtering at Low Substrate Temperature
• Relationship between Transition Temperature and x in V_W_xO_2 Films Deposited by Dual-Target Magnetron Sputtering

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