Calibration Method for Displacement Characteristics of Tube Scanners in Scanning Probe Microscopy using Coupled-Cavity Laser Diode Sensor
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概要
- 論文の詳細を見る
A handy and precise calibration method for the displacement characteristics of a tube scanner in the submicrometer scale is proposed. A coupled-cavity laser diode sensor, which acts as a submicrometer gauge with subnanometer accuracy, is used to calibrate a displacement sensor. This sensor is then used to measure the displacement sensitivity. A problem of precise measurement by scanning probe microscopy is also discussed.
- 社団法人応用物理学会の論文
- 1994-02-15
著者
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Kaneko Reizo
Ntt Interdisciplinary Laboratories Kaneko Laboratory
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Hara Shigeji
Ntt Interdisciplinary Research Laboratories
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YOKOHATA Toru
School of Mechanical Engineering, Tohoku University
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KATO Koji
School of Mechanical Engineering, Tohoku University
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Yokohata Toru
School Of Mechanical Engineering Tohoku University
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Kato Koji
School Of Mechanical Engineering Tohoku University
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