Step Coverage, Umiformity and Composition Studies Using Integrated Vapour Transport and Film-Deposition Models
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-02-15
著者
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Smy Tom
Department Of Electronics Carleton University
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DEW Steven
Department of Electrical Engineering, University of Alberta
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BRETT Michael
Department of Electrical Engineering, University of Alberta
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Dew Steven
Department Of Electrical Engineering University Of Alberta
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Brett Michael
Department Of Electrical Engineering University Of Alberta
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Brett Michael
Department Of Civil And Environmental Engineering University Of Washington
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Dew Steven
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB T6G 2V4, Canada
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