Quarter-Micron Contact Hole Filling by Ionized Beam Deposition
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-01-30
著者
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Ito Hiroki
Itami Works Mitsubishi Electric Corporation
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Kajita Naoyuki
Itami Works Mitsubishi Electric Corporation
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HANAI Masahiro
Manufacturing Development Laboratory, Mitsubishi Electric Corporation
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HASHIMOTO Yoichi
Manufacturing Development Laboratory, Mitsubishi Electric Corporation
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TANAKA Nobuo
Itami Works, Mitsubishi Electric Corporation
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Hanai M
Manufacturing Development Laboratory Mitsubishi Electric Corporation
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Hashimoto Yoichi
Manufacturing Development Laboratory Mitsubishi Electric Corporation
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Tanaka Nobuo
Itami Works Mitsubishi Electric Corporation