Autofocusing System of Optical Microscope Utilizing Electrostrictive Actuators

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概要

• 論文の詳細を見る

• A precise positioning table equipped with a pair of electrostrictive actuators and hinged levers has been manufactured. A good displacement-vs-applied-voltage relationship has been achieved with an 18-μm stroke and small hysteresis. An autofocusing system of an optical microscope utilizing the table has been assembled. The system has high precision (0.035 μm) of repeated positioning and can focus a microscope with ×100 magnification of the objective lens.

• 社団法人応用物理学会の論文
• 1991-06-15

著者

• SUYAMA Ryuji

  R & D Laboratories-1, Nippon Steel Corporation

• TANEMOTO Kei

  R & D Laboratories-1, Nippon Steel Corporation

• Tanemoto Kei

  R & D Laboratories-i Nippon Steel Corporation

• Suyama Ryuji

  R & D Laboratories-i Nippon Steel Corporation

• KOBAYASHI Yoshinari

  Development & Engineering Department, Sankyo Seiki Mfg. Co., Ltd.

• YAJIMA Masao

  Development & Engineering Department, Sankyo Seiki Mfg. Co., Ltd.

• Yajima Masao

  Development & Engineering Department Sankyo Seiki Mfg. Co. Ltd.

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• Autofocusing System of Optical Microscope Utilizing Electrostrictive Actuators

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