Bi_<12>SiO_<20> Thin Films Grown by Electron Cyclotron Resonance Plasma Sputtering with a Bi and Si Multitarget System
スポンサーリンク
概要
- 論文の詳細を見る
Bi_<12>SiO_<20> thin films have been prepared on glass and (0001) sapphire substrates by ECR plasma sputtering with a Bi and Si multitarget system. Polycrystalline thin films of δ-phase Bi_<12>SiO_<20> have been obtained without any substrate heating. These films can be transformed into γ-phase Bi_<12>SiO_<20> by heat treatment above 400℃ in air and show a large photoconductivity in the range of 380-460 nm. Epitaxial thin films of γ-phase Bi_<12>SiO_<20> have been obtained on (0001) sapphire substrates at the substrate temperature of 600℃ during the sputtering process. Excellent quadratic electrooptic effects for these epitaxial thin films are successfully observed for the first time, and a spatial light modulator using this γ-phase Bi_<12>SiO_<20> thin film has also been demonstrated. The details of the preparation, structure and some electrical and electrooptic properties of the Bi_<12>SiO_<20> thin films are described.
- 社団法人応用物理学会の論文
- 1991-12-30
著者
-
Ogawa Hisahito
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
-
Ogawa Hisahito
Central Research Laboratories Matsushita Electric Industrial Company
-
NOMURA Koji
Central Research Laboratories, Matsushita Electric Industrial Company
-
Nomura Koji
Central Research Laboratories Matsushita Electric Industrial Company
関連論文
- Visible Photoluminescence in Highly Photoconductive Hydrogenated Amorphous Silicon Deposited by Glow Discharge of SiH_4 Highly Diluted with He
- Oxygen Doping Mecharnism of Semicrystalline Poly-p-Phenylene Sulfide for Novel Photoconductive Polymer Films
- Hydrogenated Amorphous Silicon Carbide Photoreceptor for Photoaddressed Spatial Light Modulator
- A New Optical Neuron Device for All-Optical Neural Networks
- Analysis of Charge-Controlled Gray Scale in Ferroelectric Liquid Crystal Optically Addressed Spatial Light Modulator
- Molecular Orientation and Anisotropic Photoconduction of Evaporated Oligo-p-Phenylene Sulfide Films
- Bi_SiO_ Thin Films Grown by Electron Cyclotron Resonance Plasma Sputtering with a Bi and Si Multitarget System