Calculation of Layer Thickness and Composition Variations of Al_xGa_<1-x>As Crystals for Diffusion - and Electromigration - Limited Growth
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-01-15
著者
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Kato Kiyoko
Optical Semiconductor Devices Laboratories Fujitsu Laboratories Ltd.
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OKUDA Hiroshi
Optical Semiconductor Devices Laboratories, Fujitsu Laboratories Ltd.
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NAKAJIMA Kazuo
Optical Semiconductor Devices Laboratories, Fujitsu Laboratories Ltd.
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Okuda Hiroshi
Optical Semiconductor Devices Laboratories Fujitsu Laboratories Ltd.:(present Address)department Of
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Nakajima Kazuo
Optical Semiconductor Devices Laboratories Fujitsu Laboratories Ltd.