AsH_3 Cracking Characteristics in Gas Source Molecular Beam Epitaxy
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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Ohbu Isao
Production Engineering Research Laboratory Hitachi Ltd.:(present Address)central Research Laboratory
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Mozume Teruo
Production Engineering Research Laboratory Hitachi Ltd.:(present Address)central Research Laboratory
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Ataka Saburo
Yokohama Research Laboratory
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TEZEN Yuta
Yokohama Research Laboratory