Update on the Compact Synchrotron X-Ray Source Helios

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Helios is a compact superconducting Synchrotron X-ray source designed specifically for lithography. It will produce a total X-ray power of 8.2 kW when the design stored beam of 200 mA is achieved. The first phase of commissioning has just been completed in less than 2 months. A stored beam of 305 mA has been accumulated at the injection energy of 200 MeV and 55 mA has been accelerated to the full energy of 700 MeV.
社団法人応用物理学会の論文
1990-11-20

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Update on the Compact Synchrotron X-Ray Source Helios

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