Computer-Controlled Levelling for a Pneumatic Antivibration Table

スポンサーリンク

概要

• 論文の詳細を見る

• A pneumatic antivibration table with a new automatic level controlling system is developed and the performance is tested. The hardware for controlling the level is operated by an 8-bit microcomputer in order to reduce long-term drift in the vertical level of the table and to give flexibility to the hardware when applying it to automatic level control of various antivibration pneumatic tables. Continuous operation without maintenance for more than a year has proven its reliability and shown residual levelling error of around 20 μm. Antivibration characteristics under the controlling operation and the effects of an earthquake and loading of heavy apparatus on the table are checked.

• 社団法人応用物理学会の論文
• 1990-01-20

著者

• Tanaka Mitsuru

  Nanometrology Group Quantum Metrology Section National Research Laboratory Of Metrology

関連論文

• Computer-Controlled Levelling for a Pneumatic Antivibration Table
• A New Angular Shearing Interferometer for Collimation in the Nanoradian Range

スポンサーリンク