Process Techniques of 15-inch Full-Color High-Resolution Liquid Crystal Displays Addressed by a-Si Thin Film Transistors

概要

論文の詳細を見る
A 15 inch-diagonal-size full-color liquid crystal display (LCD) with 1152(×3)×900 pixels has been fabricated which enables a portable workstation with improved display performances. The process techniques used for this development are described, with special reference to metallization and dry etching. In multilevel metallization, Cr/Al interconnection is metallurgically undesirable. By contrast, the Cr/Ti/Al metal system provides excellent properties of contact resistivity and thermodynamical stability. Dry etching processes are developed for multilayered insulating films and metallizationrelated bilayers, namely SiO_2/TaO_x/SiN_x/(i/n^+)a-Si and a-Si/Ti, respectively. Fine patterning and easier stepcoverage of subsequently deposited layers are achieved.
社団法人応用物理学会の論文
1992-12-30