Surface-Imaged Silicon Polymers for 193-nm Excimer Laser Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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Smith David
Pennsylvania State University
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KUNZ Roderick
Lincoln Laboratory, Massachusetts Institute of Technology
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HORN Mark
Lincoln Laboratory, Massachusetts Institute of Technology
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WALLRAFF Greg
IBM-Almaden Research Center
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BIANCONI Patricia
Pennsylvania State University
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MILLER Robert
IBM-Almaden Research Center
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GOODMAN Russell
Lincoln Laboratory, Massachusetts Institute of Technology
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ESHEIMAN Jon
Pennsylvania State University
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GINSBERG Eric
IBM-Almaden Research Center
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Horn Mark
Lincoln Laboratory Massachusetts Institute Of Technology
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Kunz Roderick
Lincoln Laboratory Massachusetts Institute Of Technology
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Goodman Russell
Lincoln Laboratory Massachusetts Institute Of Technology