Dynamic In-Plane Motion of an X-Ray Mask Membrane Induced by Synchrotron Radiation Irradiation

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概要

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• In-plane motion of thermal distortion in an X-ray mask membrane has been investigated numerically by using a onedimensional dynamic model. The difference between continuous multiple scanning (CMS) exposure and intermittent multiple scanning (IMS) exposure methods was compared in terms of thermal distortion behavior. Since a residual temperature field is formed by the CMS exposure method, a distorted membrane is not restored to the original state for every scan. For the IMS exposure method, a distorted membrane can be restored to the original state for every scan. Thermal stresses, not dependent on the scanning speed of the CMS exposure method, decrease with increasing scanning speed of the IMS exposure method.

• 社団法人応用物理学会の論文
• 1992-09-15

著者

• Chiba Akira

  Mitsubishi Electric Corporation Lsi Laboratory

関連論文

• Dynamic In-Plane Motion of an X-Ray Mask Membrane Induced by Synchrotron Radiation Irradiation

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