Ion-Beam-Assisted Deposition of TiN Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-08-15

著者

• Chen J

  National Cheng Kung Univ. Tainan Twn

• Nagata Masayoshi

  Graduate School Of Engineering Univ. Of Hyogo

• Nagata Masanori

  Kumamoto Industrial Research Institute

• KUBOTA Hiroshi

  California Institute of Technology

• CHEN Jen

  California Institute of Technology

• KOLAWA Elzbieta

  California Institute of Technology

• NICOLET Marc

  California Institute of Technology

• Kubota Hiroshi

  California Institute Of Technology:(present Address)department Of Electrical Engineering And Compute

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• Joule Heating of a Low-Pressure Plasma Jet by means of an Applied Magnetic Field
• Study of Ag Addition to YBa_2Cu_3O_ Films Prepared using Electrophoretic Deposition
• Ion-Beam-Assisted Deposition of TiN Thin Films
• Fabrication of Ag-Doped Y_1Ba_2Cu_3O_ Superconducting Films on Cu Substrates by Electrophoretic Deposition
• Fabrication of Y-Ba-Cu-O Superconducting Films on Cu Substrates by an Electrophoretic Deposition Technique
• Magnetic Field Dependence of Voltage Noise in Y_1Ba_2Cu_3O_ Ceramic Superconductor Film

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