Surface Acoustic Wave Liquid Sensors Based on One-Port Resonator
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概要
- 論文の詳細を見る
A one-port resonator utilizing shear horizontal surface acoustic waves (SH-SAWs) has been used for sensing applications in liquids. SH-SAWs have been excited on a 36°-rotated Y-cut X-propagating LiTaO_3 substrate using interdigital transducers and the one-port resonator configuration has been used as a sensing element in liquids. The sensitivity of the resonance frequency and the Q value for the viscosity of liquids have been measured. Experimental results showed that the resonance frequency and the Q value of the SH-SAW resonator varied with the viscosity of the loaded sample liquid.
- 社団法人応用物理学会の論文
- 1993-05-30
著者
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NOMURA Tooru
Department of Electrical Communication, Shibaura Institute of Technology
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YASUDA Tsutomu
Department of Electrical Communication, Shibaura Institute of Technology
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Yasuda Tsutomu
Department Of Electrical Communication Shibaura Institute Of Technology
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Yasuda Tsutomu
Department Of Electrical And Electronics Engineering Tokyo Institute Of Technology
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Nomura Tooru
Department Of Electrical Communication Shibaura Institute Of Technology
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Nomura Tooru
Department Of Communication Engineering Faculty Of Engineering Shibaura Institute Of Technology
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Yasuda Tsutomu
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
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