Scanning Auger Microscopy Study of Heterogeneous Growth of SiC Film on Si(100) by Reaction with a C_2H_2 Beam

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-05-15

著者

• KUSUNOKI Isao

  Research Institute for Scientific Measurements, Tohoku University

• Kusunoki I

  Tohoku Univ. Sendai Jpn

• Kusunoki Isao

  Research Institute For Scientific Measurements Tohoku University

関連論文

• Physical Properties of Crystalline Films Prepared by Sputtering in Low Impurity Atmosphere
• Scanning Auger Microscopy Study of Heterogeneous Growth of SiC Film on Si(100) by Reaction with a C_2H_2 Beam
• Study on Local Structures of C_x N_ Films by First-Principles 1s Orbital Energy Calculations
• Measurements of Velocity Distributions of Thermal and Velocity-Selected Potassium Beams Scattered from the Surfaces of LiF and Graphite by Means of Time-of-Flight Method

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