Ozone Generation of Bipolar-Type Ceramic Ozonizer Module with Semiconductor Ceramic Discharge Electrode

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-03-15

著者

• Aso Y

  Reserch And Development Division Toto Ltd.

• WATANABE Toshiya

  Reserch and Development Division, TOTO, Ltd.

• NAKAYAMA Chiaki

  Reserch and Development Division, TOTO, Ltd.

• Aso Yuji

  Reserch And Development Division Toto Ltd.

• Watanabe Toshiya

  Reserch And Development Division Toto Ltd.

• Nakayama Chiaki

  Reserch And Development Division Toto Ltd.

関連論文

• Relationship between Electrical Resistivity and Electrostatic Force of Alumina Electrostatic Chuck
• Ozone Generation of Bipolar-Type Ceramic Ozonizer Module with Semiconductor Ceramic Discharge Electrode

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