Etch Pit Study of GaAs{001} LPE Layer by Molten KOH
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1978-02-05
著者
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Murata Kazuhisa
Central Research Laboratory Sharp Corporation
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Takenaka Takao
Central Research Laboratory Sharp Corporation
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HAYASHI Hiroshi
Central Research Laboratories, Sharp Corporation
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Inoguchi Toshio
Central Research Laboratory Sharp Corporation
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Inoguchi Toshio
Central Research Laboratory Hayakawa Electric Co.
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YAMAMOTO Saburoh
Central Research Laboratory, SHARP Corporation
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Yamamoto Saburoh
Central Research Laboratory Sharp Corporation
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Hayashi Hiroshi
Central Research Laboratory Sharp Corporation
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