Silicon Nitride by Using Stain Films on Silicon
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1967-03-15
著者
-
KATO Yogoro
Creative Science Education Laboratory Uenohara
-
Kato Yogoro
Creative Science Education Laboratory
-
YAMAZAKI Syunpei
Creative Science Education Laboratory
-
TANIGUCHI Ichirou
Department of Electronics, Doshisha University
-
Taniguchi Ichirou
Department Of Electronics Doshisha University
-
Yamazaki Syunpei
Creative Science Education Laboratory:department Of Electronics Doshisha University
関連論文
- Silicon Nitride Produced from the Stain Films on Silicon
- Silicon Nitride by Using Stain Films on Silicon