Measurement of Resistance by Means of Electron Beam -I-

概要

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An electron beam was applied to the measurement of electrical resistances, and the errors in the measurement were analysed. Two measuring methods, potentiometer and bridge methods, are used. To avoid the error due to thermoelectromotive force, a pulse beam is used successfully. Errors due to secondary electrons are rather serious. An adequate method should be developed to get rid of the secondary electrons from the sample. A positively biased plate near the sample was not useful for this purpose, because it accerelates positive ions and repels the high energy electrons towards the sample again.
社団法人応用物理学会の論文
1965-04-15