Preparation of Fast Detecting SnO_2 Gas Sensors

概要

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The oxidation of reactive gases at the surface of a semiconducting metal oxide is accompanied by a change in the electrical conductance. The effect was first used to detect gaseous components in air by Seiyama in 1964. In the meantime, numerous materials have been studied in attempts to optimize this effect, and at this time tin oxide seems to be a material with favorable properties. The very simple mounting of a detector on this base is a great advantage. But unfortunately some disadvantages still prevent the common application of this effect for the exact measurement of gases. One of them is the long time the detector needs to tend to the 90 % value and to regenerate. Using the method of spray pyrolysis, we prepared thin film SnO_2 sensors which in contact with gas tend to the 90 % value within 30 ms and regenerate in less than 10s.
社団法人応用物理学会の論文
1980-03-05