A Simple Estimation of Effective Cross-Sections for Electrons to Produce O_2^+, H^+, B^+ and As^+ Ions in an R.F. Ion Source

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概要

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• A simple procedure for obtaining order-estimates of the effective ionization cross-sections σ_<eff> in the ion formation reaction from molecular species in an R.F. excited ion source is outlined. Since the method is essentially empirical, the estimates obtained are recommended as a guide in the design of R. F. ion sources. Even so, our results for O_2^+ and H^+ are close to the quoted values of σ^<max.> For B^+ and As^+ which were formed from BCl_3 and AsCl_3 respectively, it is suggested that, in the absence of quoted data, our results for σ_<eff> can be used to estimate the optimum operational gas pressure for any R. F. generator of a given frequency.

• 社団法人応用物理学会の論文
• 1977-12-05

著者

• Anand K.

  Electronics Department University Of Kent

• El-DHAHER A.

  Physics Department, University of Kuwait

• El-dhaher A.

  Physics Department University Of Kuwait

関連論文

• A Simple Estimation of Effective Cross-Sections for Electrons to Produce O_2^+, H^+, B^+ and As^+ Ions in an R.F. Ion Source

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