Measurements of Modulation Transfer Function via Positive Photoresists and Their Cross Sectional Features

概要

論文の詳細を見る
Novel methods of evaluation for the modulation transfer function of an optical system havebeen introduced by utilizing positive photoresists which are commonly used in integrated circuit technology. One of them is based upon the measurement of the intensity distribution in the photoresist and its Fourier transform. Another is the measurement of contrast transmission for a square wave chart. The thickness distribution in an exposed and developed positive photoresist is proved to be a reasonable measure of the intensity distribution in the image without using any photoelectrical devices.
社団法人応用物理学会の論文
1977-11-05