Effect of Oxide Charge Density in Passivation Films on Breakdown Voltage of Planar Diodes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1975-05-05
著者
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Yamada Eiichi
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Ito Satoru
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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OTA Masataka
Semiconductor and Integrated Circuits Division, Hitachi, Ltd.
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SUGAWARA Katsuro
Semiconductor and Integrated Circuits Division, Hitachi, Ltd.
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Ota Masataka
Semiconductor And Integrated Circuits Division Hitachi Ltd.
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Sugawara Katsuro
Semiconductor And Integrated Circuits Division Hitachi Ltd.