Ellipsometric Investigation of Corrosion of Deposited Thin Molybdenum Film

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概要

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• The corrosion behavior of molybdenum film was investigated in deionized water and moisture using ellipsometry. The corrosion film on molybdenum formed in deionized water was explained by a single layer model. The corrosion rate greatly depended on the content of oxygen in doionized water and the corrosion did not saturate with time. The corrosion film in moisture was not explained by a simple single layer model in the beginning of the corrosion. Ellipsometric parameter 'P changed abnormally. The corrosion surface was considered to consist of a mixture of corrosion island and molybdenttm. These fractional volumes were calculated using Lorenz-Lorentz equation. From the change of the volumes, it was found that the corrosion of molybdenum in moisture was composed of three steps, i. e., corrosion island nucleation, corrosion island growth in the surface and corrosion film growth.

• 社団法人応用物理学会の論文
• 1975-05-05

著者

• Oikawa Hideo

  Musashino Electrical Communication Laboratory

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• Ellipsometric Investigation of Corrosion of Deposited Thin Molybdenum Film

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