Range and Standard Deviation of Ion-Implanted Phosphorus in Silicon

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1974-07-05

著者

• Okabayashi Hidekazu

  Central Research Laboratories Nippon Electric Co. Ltd.

• Okabayashi Hidekazu

  Central Research Laboratories Nippon Electric Company Ltd.

• Shinoda Daizaburo

  Central Research Laboratories Nippon Electric Co. Ltd.

• Shinoda Daizaburo

  Central Research Laboratories Nippon Electric Company Ltd.

関連論文

• Ion-Bombardment-Induced Improvement of Photoresist Mask Properties for RF Sputter-Etching
• Vapor Growth of InAs
• Magnetic Properties of Silicides of Iron Group Transition Elements
• Range and Standard Deviation of Ion-Implanted Phosphorus in Silicon

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