Sputter Etching of the SnO_2 Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1973-09-05

著者

• HAYASHI Takeshi

  Matsushita Research Institute Tokyo, Inc.

• Tsukamoto Hirokazu

  Matsushita Research Institute Tokyo Inc.

• Hayashi Takeshi

  Matsushita Research Institute Of Tokyo Inc.

• Hayashi Takeshi

  Matsushita Research Institute Tokyo Inc.

関連論文

• Tunnel Emission from Al-Al_2O_3-Metal Structures
• Temperature Dependence of the Fundamental Spectra of Potassium-Halides in the Schumann Ultraviolet Region (4.4∼13.5 eV)
• Reflectivity Spectra of KBr and KI Single Crystals in Their Fundamental Region
• Electron Emission Pattern of Thin-Film Tunnel Cathode
• Sputter Etching of the SnO_2 Film

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