Range-Energy Relations for Protons in Heavy Substrates

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概要

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• An empirical form for the electronic stopping constant for protons in heavy substrates is presented and used to compute range statistics for cases of current technological importance, including particularly proton-enhanced diffusion in silicon.

• 社団法人応用物理学会の論文
• 1973-06-05

著者

• Gibbons James

  Department Of Electrical Engineering Stanford University

関連論文

• Range-Energy Relations for Protons in Heavy Substrates

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