Electromigration in Aluminum Film Stripes Coated with Anodic Aluminum Oxide Films

概要

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The effect of an anodic-A1_2O_3-coating on the electromigration lifetime of Al stripes is investigated. Experiments show that the mean time to failure (MTF) of Al stripes is significantly increased by the presence of the anodic A1_2O_3 on stripe-surfaces. In particular the most effective structure of anodic oxide film for MTF is constructed by double layers of porous and composite oxides. It is also observed that coating with the double layers of alumina films has an effect greater than that with chemical-vapor deposited SiO_2 films, and that the Al stripes coated with either alumina or SiO_2 films have the same activation energy as Al stripes without coating. The observed difference in MTF-improvement can be explained by the difference of mechanical characteristics of the coating films.
社団法人応用物理学会の論文
1973-04-05