Protrusion Formation on Metal Targets during Co-Sputtering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1972-10-05
著者
関連論文
- Composition and Structure of Co-Sputtered Ta-Ti Alloy Thin Films
- Protrusion Formation on Metal Targets during Co-Sputtering
- Preparation of SnO_2 Films by D.C. Glow Discharge Sputtering