Quantitative Electron Probe Microanalysis of Oxygen

概要

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Electron probe microanalysis of oxgen is carried out on BeO, MgO, MnO・Al_2O_3, Al_2O_3, SiO_2, TiO, TiO_2, Mn_3O_4, (Mn, Fe)_2O_3, Fe_2O_3, Fe_3O_4 and Cu_2O. It is remarkable that the observed OK_α intensity depends upon the accelerating voltages for 5-30KV. The observed results are corrected with the modified Philibert's absorrtion correction and Poole-Thomas' atomic number correction. The mass absorption coefficients are quoted from expertmental data of Henke, Ershov and Hill. Relative errors between the electron probe microanalysis and the wet chemical analysis are less than a few percent. Dependence of observed X-ray intensity upon the accelerating voltage is also measured for CuK_α, FeK_α, TiK_α, CaK_α, SiK_α, AlK_α, OK_α and CK_α, and simple relation is found between the corrected X-ray intensity and the excitation potential, E/E_K-1.
社団法人応用物理学会の論文
1970-08-05