Silicon Nitride Prepared by the SiH_4-NH_3 Reaction with Catalysts
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1970-12-05
著者
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Taniguchi Ichiro
Department of Biotechnology, Graduate School of Engineering, Osaka University
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Yamazaki Shumpei
Department Of Electrical Engineering Faculty Of Engineering Doshisha University
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WADA Kunihiko
Department of Electrical Engineering, Faculty of Engineering Doshisha University
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Wada Kunihiko
Department Of Electrical Engineering Faculty Of Engineering Doshisha University
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Taniguchi Ichiro
Department Of Biotechnology Graduate School Of Engineering Osaka University
-
Taniguchi Ichiro
Department Of Electrical Engineering Faculty Of Engineering Doshisha University
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