Sticking Coefficients and Critical Condensation Conditions of Nickel on Polyfluoroethylene-Propylene

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概要

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• The sticking coefficient and critical condensation of nickel vapor on PFEP (polyfluoroethylene-propylene) substrates have been studied between the incident beam fluxes of 3×10^<14> and 2×10^<16> atoms/cm^2-sec and the substrate temperatures of 230 and 280℃. Measurements were made by using a separate substrate for each exposure and keeping both the flux and the temperature constant during a run. Experimental results are analyzed by using the atomistic model of nucleation theory by Lewis, which suggests an adsorption energy of nickel atoms on PFEP of 0.8 eV and a critical size of one atom. However, if E_a/E_b<0.5, pair evaporation becomes more likely than dissociation, and Zinsmeister's theory is plausible. The latter may explain qualitatively the induction periods which have been observed in the sticking coefficient measurements.

• 社団法人応用物理学会の論文
• 1971-08-05

著者

• Murakami Yoshio

  Toshiba Research And Development Center Tokyo Shibaura Electric Co. Ltd.

• MURAKAMI Yoshio

  Toshiba Research and Development Center, Tokyo Shibaura Electric Co., Ltd.

関連論文

• Sticking Coefficients of Gold Atoms in the Nucleation and Growth Process of Gold Deposits on Polyfluoroethylene-propylene
• Sticking Coefficients and Critical Condensation Conditions of Nickel on Polyfluoroethylene-Propylene

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